適用范圍: | 105~1.3×10-7Pa |
閥門漏率: | ≤1.3×10-7Pa.L/S.DN≤200 ≤6.7×10-7Pa.L/S.DN≥250 |
適用溫度: | -30~+150℃ |
閥門開啟時閥板兩側的壓差: | ≤2.7×103Pa. |
電源: | 220V/50Hz |
閥體、閥板:不銹鋼
密封件:氟橡膠、波紋管軸封、丁腈橡膠.
CCD型-電動超高真空插板閥外形及連接尺寸mm