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VCP05.1BSN-PB-NN-PW力士樂

VCP05.1BSN-PB-NN-PW力士樂

  模擬量輸出模塊擴(kuò)展
這里以一路12位模擬量輸出為例，設(shè)計(jì)中將采用12位D/A轉(zhuǎn)換芯片MAX531來實(shí)現(xiàn)數(shù)摸轉(zhuǎn)換。我們在MAX531的輸出端接運(yùn)算放大器，將模擬輸出調(diào)節(jié)至0～5V，輸出部分的硬件電路如圖3所示。這里，MAX531是12位串行D/A，具有較高的轉(zhuǎn)換速度, MAX531具有內(nèi)部參考電壓，既10#管腳(REFOUT)為2.048V，因此， D/A轉(zhuǎn)換的全量程為2.048V。而輸出信號一般要求是標(biāo)準(zhǔn)的0～5V，因此，要加一級運(yùn)放把MAX531輸出的0～2.048號轉(zhuǎn)換成 0～5號。AT89C52的P1.0和MAX531的串行時鐘信號端(SCLK)相連、AT89C52的P1.1和MAX531的串行數(shù)據(jù)輸入端(DIN)相連、AT89C52的P1.2和MAX531的片選端(CS)相連。PLC把要輸出的模擬量通過串行口傳送給單片機(jī)，存入的內(nèi)存中，再由單片機(jī)完成D/A轉(zhuǎn)換進(jìn)行輸出

ENI MKS Instruments Spectrum B-10513-00 RF Generator AMAT 0190-33638 Used Tested

ETO 80-S09-UW RF Generator Rack A AMAT 0190-18181 0290-76193 

ETO 80-S09-UW RF Generator Rack D AMAT 0190-18181 0290-76193 

ETO 80-S09-UW RF Generator Rack B AMAT 0190-18181 0290-76193 

Spectrum B-5002 MKS Instruments B-5002-03 RF Generator 

AD-Tec AX-10000W-AKT RF Plasma Generator Tested 

GHW-12Z ENI GHW12Z-13DF2NH-?001 RF Generator Genesis GHW-12 AMAT 0190-25529 New

Seren Industrial Power Systems 9400550002 RF Automatch Network ATS3 

EC100L Toyota Industries VP070-00000 Dry Pump V2.0 Tested 

American Industrial Microwave 12-002000-15 Power Supply MW6-DC 

Daihen RGA-50C-V RF Power Generator 5000W Tested 

Daihen AGA-50B2-V RF Power Generator DGP-120A2-V DC Power Supply Tested 

Daihen RGA-10D-V RF Power Generator Tested 

Daihen WGA-50E-V RF Power Generator Stack Tested 

Spectrum B-5002 MKS Instruments B-5002-02 RF Generator AMAT 0190-15320 Used

RFPP AE Advanced Energy 3150058-002J RF Generator RF-20RWC Used Tested 

AMAT Applied Materials 0010-35937 RF Match Assembly Rev. 03 New

Daihen ATM-15C Microwave Generator Magnetron Assembly 

AMAT Applied Materials 0010-22225 RF Match Reactive Preclean 

ADTEC AMV-200AMT Automatic RF Impedance Matching Unit 

AMAT Applied Materials 0010-15877 RF Match PVD Biased Electrode 

AMAT Applied Materials 0010-39207 RF Match eMAX Module 

AMAT Applied Materials 0010-42743 RF Match Bias 

AMAT Applied Materials 0010-13878 RF Match Bias Rev. P1 

AMAT Applied Materials 0010-13878 RF Match Bias Rev. 001 

ADTEC Technology AMU-3000P11 Impedance Matching Unit AMAT 0190-23777 Used

AE Advanced Energy 27-315016-00 RF Match Network 3150274-104 

AMAT Applied Materials 300750 RF Match Vectra IMP Source 0010-34895 

AE Advanced Energy 3155031-020 RF Match Navigator AMAT 0190-01371 

AE Advanced Energy 3155126-009 RF Match Box Navigator AMAT 0190-10790 Used

ASTeX FI20166 Inligent Microwave Matching Unit SmartMatch AMAT 3750-01147 New

AMAT Applied Materials 300750 RF Match Vectra IMP Source 0010-28724 

AE Advanced Energy 3155169-009 RF Match Navigator Z-Scan AMAT 0190-23122 Used

AE Advanced Energy 3155169-002 RF Match Navigator Z-Scan AMAT 0190-11693 Used

Daihen RMN-50N4 Dual Frequency RF Match Box AMAT 0190-19174 New

ASTeX FI20134 2500W Microwave Power Generator AX2050 AMAT 0920-01086 Used

ASTeX FI20195 2500W Microwave Power Generator AX2050 AMAT 0920-01104 Used

OEM-12B ENI OEM-12B-02 RF Plasma Generator AMAT 0190-70080 Tested 

ASTeX AX8403A Ozone Generator Rev. S AMAT 0190-36233 Used Tested 

Pearl Kogyo M-30A2S-V RF Match AMAT 0190-31983 New

QUANTA-10 MKS Instruments QUANTA-10D-01 Dual RF Generator Tested 

Apex 3013 AE Advanced Energy 3156114-003A RF Generator AMAT 0920-00107 Used

Daihen SGM-15B Microwave Magnetron AMAT 0920-01044 

ENI MWD-25LD-02 RF Matching Network Tokyo Electron Unity II 

Daihen SGP-15B Microwave Power Generator AMAT 1140-01216 

Daihen RMN-50N1 Dual Bais RF Match Box AMAT 0190-15322 

Seren Industrial Power Systems 9600740013 RF Power Supply L301MKII Used Tested

Daihen ATM-30A Microwave Generator AMAT 0190-02248 

Spectrum B-5002 MKS Instruments B-5002-02 RF Generator Tested Not  As-Is

AMAT Applied Materials 0010-02977 PVD RF Match Sub Zero BESC 

Daihen SMA-20B Microwave Assembly with Port 

GHW-12Z ENI GHW12Z-13DF2N0-?001 RF Generator AMAT 0190-06988 Used Tested 

AMAT Applied Materials 0010-12087 HE RF Match Etch 

AMAT Applied Materials 0010-01929 RF Match HE BESC 

AMAT Applied Materials 0010-36162 Simple Cathode RF Match 

OEM-12A ENI OEM-12A-21041-5?1 Solid State Power Generator Used Tested 

Daihen AGA-50B2-V RF Generator DGP-120A2-V DC Power Supply No Output As-Is

Daihen AGA-50B2-V RF Generator DGP-120A2-V DC Power Supply As-Is

Daihen WGA-50E-V RF Power Generator Stack Tested As-Is

Daihen RGA-50C-V RF Power Generator Tested As-Is

Daihen RGA-50C-V RF Power Generator Tested Not 

Daihen AGA-50B2-V RF Generator DGP-120A2-V DC Power Supply Tested As-Is

Daihen WGA-50E-V RF Power Generator Stack Tested Not 

Diahen AGA-50G-V RF Power Generator Untested As-Is

Daihen WGA-50E-V RF Power Generator Stack As-Is

Daihen RGA-50C-V RF Power Generator As-Is

Daihen RGA-50E-V RF Power Generator Tested As-Is

AE Advanced Energy 3155031-037 RF Match AMAT 1110-00056 

ASTeX ARX-X245 ETO RF Generator Rackmount Rev. AF Missing Panel 

ASTeX ARX-X245 ETO RF Generator Rackmount Rev. AF 

Daihen ATM-30A Microwave Generator AMAT 0190-28437